ALS Technology Co., Ltd.
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The our company's product guide
The attachment equipment E-100 series for the organic EL research
The one of the research equipment where this equipment was accumulated of ours so far under the guide of Adachi professor in the Chitose Institute of Science and Technology.
It is the attachment equipment which suited the organic EL research to have made a design concept be complete, fusing.
The main specification
|The specification item||The specification|
|The chamber size||The stainless corner type (The front door is made of aluminum).
Width 360 * height 400 * depth 395
|The exhaust type||The main pulsometer
210L/SEC which is made by turbo molecule pump Pfeiffer ("BARUZA-SU")
With the liquid-nitrogen trap The "Arabiki" coming pump The direct connection type pump which is made by Alcatel
|The inner mechanism||The basis folder (The motored live turn mechanism is on)
Basis size φ100 maximum about
With the arrival-proof shield
|The attachment source||Resistance heating attachment source compatible (Not including a port)
The number of the evaporative sources 8 sources
The simultaneous attachment To 2 sources (Dependent on the number of the powers of possible to 3 sources.)
|The attachment monitor||XTM/2 which is made from Inficon 2 type built-in
(The standard stand can have to 3 types).
|The operation||The automatic exhaust operation operation
Manual in the attachment operation
|The entry power and the other business power||AC200V 30A 1 system
The compressed air, cooling water, N2gas, (Liquid-nitrogen)
Remarks : Specified about the standard specification of the above specification by it Confirm a detailed specification with the estimate specification.
The attachment indoor part structure
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