ALS Technology Co., Ltd.


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Our company's product

The design and production sale of the vacuum equipment

The kind of the equipment
We do all design and production according to the specification of the customer.


The introduction of the product

The attachment equipment for organic EL development
The E-100 series

A this machine is equipped with the feature which suited organic EL development.

Characteristic

The automatic exhaust equipment which is easy to handle.
The simultaneous pluralism attachment (The simultaneous attachment of the evaporative source 8 sources, 2 sources)
It is equipped with more than one crystal film thickness meter.
The exhaust type uses a turbo pump.
Pure vacuum environment is made.
The start-up of the pump, the standing lowering are possible within 10 minutes.
It is possible to install a load lock mechanism. (Option)


The attachment equipment 2 room specification for organic EL research
The E-200 seriesThe new release


The main specification (The standard)

The Clio exhaust
The automatic exhaust
Simultaneous attachment's in 8 of being organic sources, the metallic 2 source


The attachment equipment economy specification for organic EL research
E-50 seriesThe new release


The main specification (The standard)

The turbo exhaust
The automatic exhaust
A maximum of 3 sources (The same time and its not being)


Organic EL raw material purge equipment


The high vacuum attachment equipment

It is the equipment which suited a general film research.

Characteristic

The exhaust type uses a turbo pump.
The structure that the exchange of the evaporative source is easy
It is possible to install a load lock mechanism. (Option)


The high vacuum exhaust equipment

Characteristic

The full and dry vacuum environment is gotten if using membrane pump for the fault draw with the exhaust equipment which used a turbo pump for mainly exhaust.
The chamber shape and the size can change optionally.
The equipment of the left photograph uses ICF203 flange and uses the rotary pump which is made by Alcatel Inc. for the fault draw.



The manufacturing and sales of the vacuum chamber, the exhaust unit
We recommend to be utilized in the validity in the unit of the holdings because the vacuum equipment is a comparatively expensive product.
For example, it installs a chamber newly in the chamber if being durability in the exhaust type and also the pump if being durability.
Or, we recommend to be exchanged.

The CAT-CVD equipment


Characteristic

It is the new CVD technology which Japan Advanced Institute of Science and Technology(JAIST) Matsumura professor is proceeding with. (The photograph is UHV compatible equipment).


The UHV attachment equipment


The high vacuum exhaust chamber


Characteristic

The electron gun evaporation source and sputter casode can be incorporated by the customer.
It is possible to install a load lock mechanism.


The UHV exhaust chamber


Characteristic

It installs and it uses the ion pump of the holdings and so on as the analysis equipment business.


The career box


Characteristic

It is the box which transports wafer of 4 inches in the airtight environment. (Small size which is put in the glove box, too))

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